• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention relates to a vibration sensor comprising a pressure detection device adapted to detect generated pressure variations and provide an output signal in response to the detected pressure variations, the pressure detection device comprising a microphone unit comprising a microphone capsule and a signal processing unit, and a pressure generating device. , which is arranged to generate pressure variations in response to vibrations thereof, the pressure generating device comprising a suspension element and a movable mass attached thereto, the pressure generating device being attached to an outer surface portion of the pressure detecting device. In a preferred embodiment, the pressure detection device comprises a separate and independent MEMS microphone unit comprising a MEMS microphone capsule and a signal processing unit.
    公开号:DK202100080U1
    申请号:DK202100080U
    申请日:2021-09-22
    公开日:2021-09-27
    发明作者:Mögelin Raymond；Christiaan Post Peter
    申请人:Sonion Nederland Bv；
    IPC主号:
    专利说明:

    DK 2021 00080 U1 1 VIBRATION SENSOR WITH LOW FREQUENCY ROLL-OFF RESPONSE CURVE
    FIELD OF THE INVENTION The present invention relates to a vibration sensor having a predetermined low frequency roll-off response curve and optionally a predetermined attenuation of a mechanical resonant frequency.
    BACKGROUND OF THE INVENTION Most of today's vibration sensors have a flat low frequency response curve, i.e. the frequencies below the mechanical resonant frequency of typical vibration sensors are not attenuated, be it acoustically or in any other way. For various reasons, such as noise or congestion, it is advantageous to remove, or at least attenuate, the low frequencies. A frequently used approach is to remove or attenuate the low frequencies electronically by means of an electronic filter in, for example, the signal processing device. However, this approach is not advantageous, as the mechanical system of the sensor or the input stage of the signal processing device may still be overloaded by precisely the low frequency signals which the electronic filter is intended to remove. The electronic filters also take up valuable space on the ASIC, can cause distortion of the signal and cause thermal noise that can damage the signal-to-noise ratio. Typical prior art solutions are discussed in CN 2727712 Y and US 2011/0179876 A1. In addition, US 2010/0275675 A1 describes a pressure sensor which depends on altered resonance conditions in an ultrasonic cavity, EP 2 536 169 A1 describes an optical microscope using a phase shift of a reflected light from a flexible acoustic membrane, and JP 2013-175847 A describes a vibration sensor that is dependent on the transmission of vibrations through two interconnected vibration transmission units. It can be considered as an object of the embodiments of the present invention to provide a vibration sensor having a predetermined low frequency response curve. It can be considered as a further object of the embodiments of the present invention to provide a device in which the predetermined low frequency response curve of the vibration sensor is not provided by electronic means. It can be considered as a still further object of the embodiments of the present invention to provide a vibration sensor having a predetermined attenuation of a mechanical resonant frequency.
    DESCRIPTION OF THE INVENTION The above objects are achieved by providing a vibration sensor comprising 1) a movable mass adapted to generate pressure variations in response to movements thereof, 2) a pressure transmitting device for transmitting the generated pressure variations, 3) a pressure detecting device, arranged to detect the transmitted pressure variations and provide an output signal in response to the detected pressure variations, and 4) a first acoustic aperture defining a first acoustic impedance acoustically connected to the pressure transmitting device, the first acoustic impedance determining a predetermined low frequency roll-off response for the vibration sensor. The present invention thus relates to a vibration sensor in which pressure variations generated by movements of a moving mass are detected by means of a suitable pressure detection device. The generated pressure variations are propagated over a pressure transmitting device in the form of a pressure transmitting volume before they reach the suitable pressure detecting device. As will be explained later, the vibration sensor may comprise a plurality of moving masses, a plurality of pressure transmission devices as well as a plurality of pressure detection devices.
    In the present description, a predetermined low frequency roll-off response is to be understood as meaning that the vibration sensor response below a predefined frequency can be attenuated in a predetermined manner. If the input signal contains a high level of unwanted signals (noise) below the predefined frequency, this type of attenuation is an advantage, as traditional overloading of processing electronics, such as ASIC, can then be completely avoided.
    Alternatively, the predetermined low frequency roll-off response can be provided by the first acoustic impedance and processing electronics in combination.
    It is an advantage that the predetermined low frequency roll-off response can provide an opportunity to increase the gain of signals by a frequency above the predefined frequency, without possible overloading of processing electronics due to noise signals.
    The first acoustic impedance can determine a predefined attenuation at selected frequencies by providing a low frequency roll-off for the response curve. The frequency at which this response can start roll off, the so-called -3 dB point, can be varied by varying the value of the first acoustic impedance, and can in principle be chosen arbitrarily.
    This -3 dB point can be in the frequency range from 50-2000 Hz, such as approx. 100 Hz, 200 Hz, 500 Hz or 1000 Hz. The first acoustic impedance results in a rate at which the response curve is cut off at -6dB / octave. Higher roll-off rates can be achieved by combining the acoustic roll-off with other known filter / attenuators, electronically, acoustically or in any other way, resulting in a greater filtering / attenuation.
    The moving mass can be implemented in various ways, such as a massive structure. In order to be able to move in response to vibrations, the movable mass can be suspended in a flexible suspension element. The following description will show that the flexible suspension element can be implemented in different ways.
    As stated above, the pressure transmitting device may involve a pressure transmitting volume in which pressure variations generated by the moving mass are allowed to propagate to reach a suitable pressure detection device.
    The first acoustic aperture defining the first acoustic impedance comprises a through aperture of predetermined dimensions, which predetermined dimensions determine the first acoustic impedance. The larger the dimensions of the through-opening, the smaller the acoustic impedance in general.
    The first acoustic impedance is provided between the pressure transmitting device and the outside of the vibration sensor, i.e. an open and infinite volume. Alternatively or in combination therewith, the first acoustic impedance may be provided in parallel with the pressure detecting device, such as between the pressure transmitting device and a substantially closed volume. In this configuration, the pressure transmitting device can act as an acoustic front volume, while the substantially closed volume can act as an acoustic rear volume.
    The vibration sensor of the present invention may further comprise a second acoustic aperture defining a second acoustic impedance between the pressure transmitting device and a substantially closed attenuation volume. The second acoustic impedance can, in combination with the moving mass and the substantially closed one
    DK 2021 00080 U1 4 attenuation volume, determine a predetermined attenuation of a mechanical resonant frequency for the vibration sensor.
    The mechanical resonant frequency of the vibration sensor is typically a few kHz, such as between 1 kHz and 10 kHz, with peak levels of up to several 10s of dB, such as between 5 dB and 45 dB. The level of attenuation of the mechanical resonance frequency can range from a small attenuation up to a full attenuation of the peak, i.e. between 5 and 45 dB. The pressure transmitting device and the substantially closed damping volume can be arranged substantially opposite to the movable mass, i.e. the movable mass can, possibly in combination with a suspension element, separate the pressure transmitting device and the damping volume. The suspension element and / or the movable mass can thus define at least a part of a limit of the substantially closed damping volume.
    The second acoustic impedance between the pressure transmitting device and the damping volume may comprise a through-opening in the movable mass and / or in a suspension element in which the movable mass is suspended. The predetermined dimensions of the through aperture can determine the second acoustic impedance. The larger the dimensions of the through-opening, the smaller the acoustic impedance.
    The pressure detection device comprises a pressure sensitive device adapted to detect the transmitted pressure variations. As previously stated, the pressure sensitive device forms part of a microphone, such as an electret microphone or a MEMS microphone. The suspension element and / or the movable mass can, in combination with the pressure-sensitive device, define at least a part of a limit of the pressure-transmitting device. Furthermore, a primary direction of movement of the movable mass and a direction of movement of at least a part of the pressure-sensitive device, such as a detection membrane, may be substantially parallel to each other. Alternatively, a primary direction of movement of the movable mass and a direction of movement of at least a portion of the pressure sensitive device, such as a detection diaphragm, may be angled relative to each other.
    The vibration sensor may further comprise one or more auxiliary moving masses arranged to generate pressure variations in response to corresponding movements thereof, wherein the one or more auxiliary moving masses may be arranged to move in either different directions or in substantially the same direction. . The vibration sensor may thus, for example, comprise three movable masses having the primary directions of movement in either the same direction or in directions angled relative to each other, such as in three directions angled substantially 90 degrees relative to each other for to be sensitive to 3D vibrations.
    The movable masses can be arranged so that they generate a combined pressure difference in one pressure transmitting device, which pressure difference is detected by means of one pressure detection device.
    Alternatively, the moving masses may generate pressure differences in a plurality of pressure transmission devices detected by a plurality of pressure detection devices.
    Furthermore, the movable masses can, by means of their corresponding suspension devices, be arranged to provide linear and / or rotational movements in response to incoming vibrations.
    The vibration sensor of the present invention further comprises signal processing means, such as one or more ASICs, for processing the output signal from the pressure detecting device.
    The present invention relates to a vibration sensor according to claim 1. The present invention thus relates to a pressure generating device attached to an outer surface portion of a pressure detecting device.
    This outer surface portion of the pressure detection device may preferably be the largest outer surface of the pressure detection device.
    The reason for this is that the area of the active components of the pressure generating device, such as a suspension element and a movable mass, can then be maximized.
    The suspended movable mass generates pressure variations in response to movements of the vibration sensor.
    The present invention thus relates to a vibration sensor in which pressure variations generated by the movements of a moving mass are detected by means of a suitable pressure detection device comprising a microphone unit comprising a microphone capsule and a signal processing unit.
    The generated pressure variations are propagated over a pressure transmitting device in the form of a pressure transmitting volume or an intermediate volume before they reach the suitable pressure detecting device.
    The microphone unit comprises a separate and independent MEMS microphone unit comprising a MEMS microphone capsule and the signal processing unit.
    In the present context, a separate and independent MEMS microphone unit is to be understood as meaning a fully functional microphone unit.
    The MEMS capsule of the microphone unit may comprise a readout device comprising a piezo, a biased plate capacitor or an electret plate capacitor.
    It is an advantage to use a separate and independent MEMS microphone, as at least the following advantages are associated with it: low development costs, the low price of the MEMS microphone unit itself, it is easy to brand, it is reflowable, there are both digital and analog variants, different available sizes (balance with performance (sensitivity / noise)) etc.
    The separate and independent MEMS microphone unit comprises a first printed circuit board to which first printed circuit board the MEMS microphone capsule and the signal processing unit are electrically connected.
    The separate and independent MEMS microphone unit further comprises a second printed circuit board comprising a plurality of contact zones arranged thereon, which second printed circuit board is arranged opposite to the first printed circuit board. The separate and independent MEMS microphone unit thus forms a sandwich construction, where the first and second printed circuit boards are the upper and lower surface, respectively.
    There is an intermediate volume between an outer surface of the first printed circuit board of the MEMS microphone unit and a surface of the suspension element. This intermediate volume is considered as a pressure transmitting volume, through which the generated pressure variations are propagated to the MEMS microphone unit. To enable generated pressure variations to penetrate the MEMS microphone unit and thereby reach the MEMS capsule, the first printed circuit board comprises a through-opening acoustically connected to the intermediate volume. The intermediate volume may be less than 5 mm, such as less than 2 mm, such as less than 1 mm, such as less than 0.75 mm, such as less than 0.5 mm, such as less than 0.25 mm. , such as less than 0.1 mm .
    In order to provide sufficient pressure variations, the area of the suspension element may be greater than 0.5 mm , such as greater than 1 mm , such as greater than 2 mm , such as greater than 4 mm , such as greater than 6 mm , such as greater than 8 mm. , such as larger than 10 mm . The mass of the movable mass is greater than 0.004 mg, such as greater than 0.04 mg, such as greater than 0.4 mg, such as greater than 1 mg, such as greater than 2 mg, such as approx. 4 mg.
    BRIEF DESCRIPTION OF THE DRAWINGS The present invention will now be described in more detail with reference to the accompanying figures, in which Figs. 1 shows a cross section of the general underlying principle of the present invention,
    FIG. Fig. 2 shows cross-sections of the various suspension elements of the movable mass; Fig. 3 shows a cross section of a vibration sensor having a low frequency roll-off response; Fig. 4 shows a cross section of a vibration sensor having a low frequency roll-off response and an attenuation of a resonant frequency; Fig. 5 shows different low frequency roll-off responses; Fig. 6 shows different low frequency roll-off responses and different attenuation properties of a resonant frequency; Fig. 7 shows a vibration sensor having two movable masses and a common pressure transmission device; Fig. 8 shows a vibration sensor having two movable masses and two pressure transmission devices; Fig. 9 shows a first combination of a MEMS microphone and a pressure variation generator according to the invention; Fig. 10 shows another combination of a MEMS microphone and a pressure variation generator according to the invention, and 11 shows a third combination of a MEMS microphone and a pressure variation generator according to the invention. Although the invention may undergo various modifications and take alternative forms, specific embodiments are shown by way of example in the drawings and are described in detail herein. It is to be understood, however, that the invention is not limited to the specific forms described.
    DETAILED DESCRIPTION OF THE INVENTION In its broadest aspect, the invention relates to a vibration sensor in which pressure variations generated by one or more moving masses are detected by means of suitable detection means, such as one or more microphones. The microphones can in principle be of any suitable type, including electret or MEMS microphones.
    DK 2021 00080 U1 8 Referring now to Figs. 1, the underlying principle of the present invention is depicted. In general, the vibration sensor 100 of the present invention comprises a movable mass 101 adapted to move as indicated by the arrow 105 in response to vibrations as indicated by the arrow 106. The movable mass 101 is suspended in a form of a flexible suspension element 103, whereby the movable mass 101 can move as indicated by the arrow 105. The suspension element 103 can be implemented in different ways as shown in Figs. 2. Now returning to Figs. 1, a microphone 104 is provided for detecting the pressure variations transmitted through the pressure transmitting volume 102 in response to the vibration-induced movements of the moving mass 101. A vibration sensor of the type depicted in FIG. 1, typically has a mechanical vibration frequency of about a few kHz, such as between 1 kHz and 10 kHz.
    Referring now to FIG. 2, various implementations of the flexible suspension element for suspending the movable mass are depicted.
    In FIG. 2a, the movable mass 201 is suspended to the sides by means of the suspension element 204. The movable mass 201 is arranged to respond to vibrations as indicated by the arrow 205, i.e. in a direction substantially perpendicular to the main direction of the extension of the suspension member 204. Pressure variations generated by movements of the moving mass 201 are transmitted via the pressure transmitting volume 203 and are detected by the microphone 202.
    In FIG. 2b, the movable mass 206 is located on top of the suspension member 209. The movable mass 206 is arranged to respond to vibrations as indicated by the arrow 210. Associated pressure variations generated in the pressure transmitting volume 208 are detected by the microphone 207.
    In FIG. 2c, the movable mass 211 is suspended to the sides via the outer suspension member 214. The movable mass 211 is adapted to respond to vibrations as indicated by the arrow 215. Associated pressure variations generated in the pressure transmitting volume 213 are detected by the microphone 212. .
    Finally, in Figs. 2d, the movable mass 216 is suspended in the outer suspension member 219. The movable mass 216 is arranged to respond to vibrations as indicated by the arrow 220, i.e. in the longitudinal direction of the suspension element 219. Associated pressure variations generated in the pressure transmitting volume 218 are detected by the microphone 217.
    DK 2021 00080 U1 9 In the various implementations depicted in Figs. 2. the suspension element 204, 209, 214, 219 may be in the form of a spring, such as a coil spring, a leaf spring, tension-free diaphragm or any other flexible material. As already stated, the microphones 202, 207, 212, 217 can in principle be of any shape, including - electret or MEMS microphones.
    Referring now to FIG. 3 shows both FIG. 3a and 3b embodiments where acoustic impedances are provided in the form of acoustic apertures 307, 315. The acoustic impedances ensure that the vibration sensor has a predetermined low-frequency roll-off response curve, i.e. a predetermined attenuation of the response curve below a predetermined frequency. FIG. 3a shows an embodiment of the vibration sensor, in which an acoustic opening 307 is provided between the pressure-transmitting volume 302 and the exterior of the vibration sensor. The acoustic impedance of the acoustic aperture 307, together with the other mechanical / acoustic properties of the system, determines the behavior of the low-frequency roll-off response curve of the vibration sensor, cf. 5 and 6. In addition to the acoustic aperture 307, the embodiment shown in Figs. 3a, a movable mass 304 suspended in a flexible suspension member 305. The movable mass 304 is adapted to move in the direction of the arrow 308. The movable mass 304 in combination with the flexible suspension element 305 separates the two volumes 301 and 302 - the latter being the pressure transmitting volume 302. The third and optional volume 303 may also be provided. The pressure variations induced by the moving mass 304 are detected by the microphone 306. FIG. 3b shows an embodiment of the vibration sensor, in which an acoustic opening 315 is provided between the pressure-transmitting volume 310 and a substantially closed volume 311. The pressure-transmitting volume 310 and the substantially closed volume 311 act as front and rear volumes, respectively, relative to the microphone 314. Similar to the embodiment of FIG. Fig. 3a determines the acoustic impedance of the acoustic aperture 315 for the low frequency roll-off response curve of the vibration sensor, cf. 5 and 6. In addition to the acoustic aperture 315, the embodiment shown in Figs. 3b, a movable mass 312 suspended in a flexible suspension element 313. The movable mass 312 is arranged to move in the direction of the arrow 316. The movable mass 312 in combination with the flexible suspension element 313 separates the volume 309 from the pressure transmitting volume 310. The pressure variations induced by the movable mass 312 are detected by the microphone 314.
    DK 2021 00080 U1 10 With regard to Fig. 4, there is shown an embodiment 400 comprising a first acoustic aperture 408 and a second acoustic aperture 406. The first acoustic aperture 408 provides a predetermined low frequency roll-off response curve for the vibration sensor, while the second acoustic aperture 406 provides a predetermined attenuation of the mechanical resonant frequency of the vibration sensor. In FIG. 4, the first acoustic opening 408 connects the pressure transmitting volume 402 to a substantially closed rear volume.
    403. Alternatively, the first acoustic aperture 408 could connect the pressure transmitting volume 402 (front volume) to the exterior of the vibration sensor. The second acoustic opening 406 is provided through the movable mass 404. Alternatively or in combination therewith, the second acoustic opening 406 could be provided through the flexible suspension member 405 to which the movable mass 404 is attached. The movable mass 404 is arranged to move as indicated by the arrow 409. The pressure variations induced by the movable mass 404 are detected by the microphone 407.
    Still referring to FIG. 4, a combined low frequency roll-off and resonance peak attenuation can be provided by connecting volumes 401 and 403 acoustically. Alternatively, the volumes 401 and 403 could be acoustically connected to the exterior of the vibration sensor, thereby boosting the low frequencies.
    In the embodiments depicted in Figs. 1-4, the movable masses and the microphones are placed opposite to the pressure transmitting volumes. In alternative embodiments, the pressure-transmitting volume may be curved, bent or in other ways twisted so that the movable mass and the microphone are no longer arranged opposite, but more closely angled relative to each other, cf. 8.
    In FIG. 5 depicts various simulated low frequency roll-off responses. The shape of the low-frequency roll-off is determined by the dimensions of the first acoustic aperture 408, cf. 4. A large acoustic aperture results in a smaller initial acoustic impedance which causes a large low frequency roll-off.
    Similar to FIG. 5, various simulated low frequency roll-off responses are depicted in FIG.
    6. In addition to the first acoustic opening 408, cf. FIG. 4, the damping effect of the second acoustic aperture 406 is also depicted. A large acoustic aperture again results in a small second acoustic impedance, which causes a low resonant frequency, i.e. high attenuation.
    FIG. Fig. 7 shows an embodiment 700 with two movable masses 703, 706 suspended in corresponding flexible suspension elements 704, 707. As shown in Figs. 7, the movable masses 703, 706 are arranged to move in substantially perpendicular directions.
    DK 2021 00080 U1 11 directions, as indicated by the corresponding arrows 705, 708. The vibration sensor shown in Figs. 7, is thus sensitive to vibrations in two perpendicular directions. To provide the vibration sensor with a predetermined low frequency roll-off response curve, a first acoustic opening 714 is provided between the common pressure transmitting volume 709 and a substantially closed volume 715.
    Second acoustic openings 712, 713 are provided between the common pressure transmitting volume 709 and the corresponding volumes 701, 702 acoustically separated by the wall 711. It should be noted that the wall 711 may optionally be omitted so that the volumes 701 and 702 are a single volume, and other acoustic openings 712 and 713 act as a single acoustic opening. The second acoustic apertures 712, 713 ensure a predetermined attenuation of the mechanical resonant frequency of the vibration sensor. A microphone 710 is provided in the common pressure transmitting volume 709. With respect to FIG. 8, a vibration sensor 800 is now shown with separate pressure transmitting volumes 809, 812 and separate microphones 810, 813. Corresponding to the embodiment according to FIG. 7 includes the embodiment 800 shown in FIG. 8, two movable masses 803, 806 suspended in corresponding flexible suspension elements 804, 807. The movable masses 803, 806 are arranged to move in substantially perpendicular directions as indicated by the corresponding arrows 805, 808. There are again provided second acoustic openings 814, 815 between the spaced pressure transmitting volumes 812, 809 and the corresponding volumes 801, 802 acoustically separated by the wall 811. Similar to FIG. 7, the wall 811 may optionally be omitted so that the volumes 801 and 802 are a single volume, and other acoustic openings 814 and 815 function as a single acoustic opening. To provide a predetermined low frequency roll-off response curve for the vibration sensor, the first acoustic apertures 816, 817 are provided between the spaced pressure transmitting volumes 809, 812 and correspondingly substantially closed volumes 818, 819. Separate microphones 810, 813 are provided. corresponding pressure-transmitting volumes 809, 812. It should be noted that the pressure-transmitting volumes 809, 812 may optionally be combined into a single pressure-transmitting volume. Similarly, the substantially closed volumes 818, 819 can also be combined. The second acoustic apertures 814, 815 ensure a predetermined attenuation of the mechanical resonant frequency of the vibration sensor.
    DK 2021 00080 U1 12 Similar to the vibration sensor shown in Fig. 7, the vibration sensor of FIG. 8 sensitive to vibrations in two perpendicular directions. It should be noted, however, that vibration sensors with more than two movable masses can also be implemented. For example, a 3D vibration sensor involving three moving masses may be implemented if the motions of the corresponding three moving masses are substantially perpendicular to each other. Generally and as previously stated, the movable masses may be suspended to perform rotational movements instead of, or in combination with, linear movements. FIG. 9 shows a vibration sensor 900 comprising a MEMS microphone and a pressure variation generator located on top of the MEMS microphone. The MEMS microphone can use various technologies, including piezo, charged plate capacitor, etc. The signal processing of the MEMS microphone can be analog or digital using any digital coding protocol. The MEMS microphone comprises a housing having an upper circuit board 902 and a lower circuit board 903 on which electrodes 916, 917 are provided for electrically connecting the vibration sensor.
    900. The electrodes 916, 917 may be in the form of solder pads. An acoustic opening 910 is provided in the upper circuit board 902. A wall portion 901 is provided between the upper circuit board 902 and the lower circuit board 903. Inside the MEMS microphone, a MEMS capsule 911 is provided comprising a diaphragm 912 and a front chamber. 918.
    The MEMS microphone further comprises a rear chamber 914, in which rear chamber 914 a signal processor 913 and one or more vias 915 are provided. As stated above, a pressure variation generator is arranged on top of the MEMS microphone. As can be seen in Figs. 9, the pressure variation generator is attached to the upper circuit board 902. The pressure variation generator comprises a housing 904, a suspension member 906 and a movable mass 905 attached to the suspension member 906. The suspension member 906 and the movable mass 905 comprise the acoustic openings 908 and 907, respectively. 904 may be made of any suitable material as long as it seals the inside completely. A thin metal shield is preferably used. A small hole with a low frequency roll off below 10 Hz can be allowed, as such a small hole does not introduce acoustic noise. The mass of the movable mass 905 is preferably approx. 4 mg. It is estimated that the actual minimum mass will be approx. 0.004 mg, as it would add +30 dB to the noise. Similarly, a mass of 0.04 mg would add +20 dB to the noise and a mass of 0.4 mg would add
    +10 dB for noise. The larger the mass of the moving mass, the lower the effect of the thermal motion noise of the vibration sensor.
    The area of the suspension element 906 and the movable mass 905 should be as large as possible, and preferably larger than 0.5 mm , such as larger than 1 mm , such as larger than 2 mm , - such as larger than 4 mm , such as larger than 6 mm , such as greater than 8 mm , such as greater than 10 mm . It is an advantage of a large area of the suspension element 906 and the movable mass 905, as this requires a smaller amplitude for the movement of the movable mass 905 to achieve a certain volume displacement and thereby sensitivity.
    As can be seen in Figs. 9, there is a small volume 909 between the suspension member 906 and the upper side the upper printed circuit board 902. The volume should be as small as possible, and preferably less than 5 mm , such as less than 2 mm , such as less than 1 mm , such as less than 0.75 mm , such as less than 0.5 mm , such as less than 0.25 mm , such as less than 0.1 mm. A deformable seal 919 in the form of, for example, a foil, membrane or gel is preferably provided along the edges of the suspension member 906. The deformable seal should preferably have a low stiffness and it should be able to withstand reflow temperatures. The volume above the suspension element 906 of the pressure variation generator may optionally be acoustically connected to the rear volume 914 of the MEMS microphone. This acoustic connection (not shown) may be provided, for example, by means of a rar.
    FIG. 10 shows an alternative vibration sensor 1000, which also comprises a MEMS microphone and a pressure variation generator arranged on top of at least a part of the MEMS microphone. The MEMS microphone can again use various technologies, including piezo, charged plate capacitor, etc., and the signal processing of the MEMS microphone can be analog or digital using any digital coding protocol.
    Referring to FIG. 10, the MEMS microphone comprises a housing having a shield 1001 and circuit board 1002 on which electrodes 1012 are provided for electrically connecting the vibration sensor 1000. The electrode 1012 may be in the form of solder pads.
    An acoustic aperture 1010 is provided in the circuit board 1002. Inside the MEMS microphone, a MEMS capsule 1006 is provided which includes a diaphragm 1008 and a front chamber 1011.
    The MEMS microphone further comprises a rear chamber 1009, where inside the rear chamber 1009 a signal processor 1007 is provided. As stated above, a pressure variation generator is arranged on top of at least a part of the MEMS microphone. As seen in
    DK 2021 00080 U1 14 FIG. 10, the pressure variation generator is attached to the circuit board 1002. The pressure variation generator comprises a housing 1003, a suspension element 1005 and a movable mass 1004 attached to the suspension element 1005. The movable mass 1004 having an opening 1012 and the suspension element 1005 can be implemented as described in connection with the embodiment. , shown in Figs. 9. Corresponding to the embodiment shown in Figs. 9, a small volume 1013 between the suspension element 1005 and the upper side of the printed circuit board 1002. This volume should again be as small as possible, and preferably less than 5 mm , such as less than 2 mm , such as less than 1 mm , such as less than 0.75 mm , such as less than 0.5 mm , such as less than 0.25 mm , such as less than 0.1 mm3.
    FIG. 11 shows yet another vibration sensor 1100, which also includes a MEMS microphone and a pressure variation generator mounted on top of a MEMS microphone. Compared with Figs. 9 and 10 is the vibration sensor depicted in Figs. 11, facing up. The MEMS microphone can again use various technologies, including piezo, charged plate capacitor, etc., and the signal processing of the MEMS microphone can be analog or digital using any digital coding protocol.
    In FIG. 11, the MEMS microphone comprises a housing having a shield 1101, PCB 1103 and a support structure 1104 on which electrodes 1105 are provided for electrically connecting the vibration sensor 1100. The electrodes 1105 may be in the form of solder pads.
    An acoustic opening 1108 is provided in the printed circuit board 1103. Inside the MEMS microphone, a MEMS capsule 1110 is provided, which comprises a diaphragm 1111 and a front chamber.
    1113. The MEMS microphone further comprises a rear chamber 1112, inside which rear chamber 1112 a signal processor 1114 is provided. As can be seen in Figs. 11, the pressure variation generator is attached to the circuit board 1103. The pressure variation generator comprises a housing 1102, a suspension element 1106 and a movable mass 1107 attached to the suspension element 1106. The movable mass 1107 comprising an opening 1109 and the suspension element 1106 can be implemented as described in connection with the embodiment shown in Figs. 9.
    Corresponding to the embodiments shown in Figs. 9 and 10, there is a small volume 1115 between the suspension element 1106 and the lower side of the printed circuit board 1103. This volume should again be as small as possible, and preferably less than 5 mm , such as less than 2 mm , such as less than 1 mm , such as less than 0.75 mm , such as less than 0.5 mm , such as less than 0.25 mm , such as less than 0.1 mm.
    权利要求:
    Claims (3)
    [1]
    A vibration sensor (900) comprising 1) a pressure detecting device adapted to detect generated pressure variations and provide an output signal in response to the detected pressure variations, the pressure detecting device comprising a MEMS microphone comprising a housing having a first printed circuit board (902), wherein an acoustic aperture (910) is provided in the first printed circuit board (902), and wherein the housing of the MEMS microphone further comprises a second printed circuit board (903) on which electrodes (916, 917) are provided for an electrical connection of the vibration sensor (900), and a wall portion (901) provided between the first printed circuit board (902) and the second printed circuit board (903), and wherein one or more continuous electrical connections (915) are provided in the rear chamber ( 914), and wherein the MEMS microphone further comprises a MEMS capsule (911) comprising a diaphragm (912) and a front chamber (918), and a rear chamber (914), within which rear chamber (914) a si a pressure generating device (913), 2) a pressure generating device adapted to generate pressure variations in response to vibrations thereof, the pressure generating device comprising a housing (904), a suspension element (906) and a movable mass (905) attached to the suspension element (906), and wherein the suspension element (906) and the movable mass (905) comprise respective acoustic openings (908, 907) where the pressure generating device is attached to an outer surface portion of the MEMS microphone, and where there is a volume (909) between the suspension member (906) and an outer surface of the first printed circuit board (902), and wherein the acoustic opening (910) of the first printed circuit board (902) is acoustically connected to the volume (909).
    [2]
    The vibration sensor (900) of claim 1, wherein the volume (909) is less than 5 mm , such as less than 2 mm , such as less than 1 mm , such as less than
    - 2 - 0.75 mm , such as less than 0,5 mm , such as less than 0,25 mm , such as less than 0,1 mm.
    [3]
    A vibration sensor (900) according to any one of claims 1 to 2, wherein the area of the suspension element (906) is greater than 0.5 mm , such as greater than 1 mm , such as greater than 2 mm , such as greater than 4 mm. mm , such as greater than 6 mm , such as greater than 8 mm , such as greater than 10 mm .
    A vibration sensor (900) according to any one of claims 1 to 3, wherein the mass of the movable mass (905) is greater than 0.004 mg, such as greater than 0.04 mg, such as greater than 0.4 mg, such as greater than 1 mg, such as greater than 2 mg, such as about 4 mg.
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    US20170111731A1|2017-04-20|Microphone assembly with suppressed frequency response
    KR102359913B1|2022-02-07|Microphone
    CN108174333A|2018-06-15|Capacitance-type transducer system, capacitance-type energy converter and sound transducer
    CN106162476A|2016-11-23|The mike monomer of anti-low frequency noise
    JP4212635B1|2009-01-21|Voice input device, manufacturing method thereof, and information processing system
    US20210044890A1|2021-02-11|Vibration removal apparatus and method for dual-microphone earphones
    SU1046632A1|1983-10-07|Pressure pickup
    JP2009130390A|2009-06-11|Voice input device, its manufacturing method and information processing system
    KR20040067399A|2004-07-30|unidirectional condenser microphone
    WO2022000792A1|2022-01-06|Vibration sensor
    JP2003287549A|2003-10-10|Acceleration sensor
    同族专利:
    公开号 | 公开日
    US10794756B2|2020-10-06|
    DE17165245T1|2020-12-24|
    EP3279621A1|2018-02-07|
    DK3279621T1|2020-11-09|
    US20180058915A1|2018-03-01|
    DK3279621T5|2021-05-31|
    EP3279621B1|2021-05-05|
    DK202000120U1|2020-11-19|
    DK3279621T3|2021-05-10|
    DK202100080Y3|2021-10-06|
    DK202000121U1|2020-11-19|
    DK202100078U1|2021-09-28|
    EP3703389A1|2020-09-02|
    DK202000120Y4|2021-04-09|
    DE20164885T1|2020-12-24|
    US20190323881A1|2019-10-24|
    US10386223B2|2019-08-20|
    DK3703389T1|2020-11-09|
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    法律状态:
    2021-09-27| UAT| Utility model published|Effective date: 20210922 |
    2021-10-06| UME| Utility model registered|Effective date: 20211006 |
    优先权:
    申请号 | 申请日 | 专利标题
    EP16186012|2016-08-26|
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